SharePoint 2010: Site Definition Failed to instantiate file “default.master” from module “DefaultMasterPage”

Why this happen is because user modified the Template Name in the webtemp_SiteDefinitionName.xml to something else that isn’t matching the package get deploy under ../14/Template/SiteTemplate/SiteDefinitionName 

Right

<Tempate Name=”SiteDefinitionName” ID=”10000″>

</Template>

Wrong

<Tempate Name=”CustomSiteDefinitionName” ID=”10000″>

</Template>

The SiteDefinitionName in the template name must be the exactly same as what will get deployed to the site template folder

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